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Coating and developing equipment Product List

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Coating and Developing Equipment ACS300 Gen2

Coating and Developing Equipment ACS300 Gen2

Type up to 300mm - Spin Coating/Developing Cluster

Wafer-level packaging for mass production and 3D integration.

  • Other processing machines
  • Coating and developing equipment

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Coating and Developing Equipment ACS200

Coating and Developing Equipment ACS200

Fully automatic, compatible with a maximum of 200mm.

By docking our mask aligner module with the full-area exposure method, it can be used as the Ring Graphy Cluster LithoFab200.

  • Other processing machines
  • Coating and developing equipment

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